UDC 66.088

OVERVIEW OF GAS-PHASE CHEMISTRY FOR DRY ETCHING SEMICONDUCTOR COMPOUNDS

Zapevalin Alexander Ivanovich
Penza State University
Postgraduate of "Instrument making" department

Abstract
In this article, a brief overview of various gas-phase chemistry to etch GaAs, AlGaAs, InP, InGaAs, InSb, and InAs. Briefly outlines the advantages of each process.

Category: 02.00.00 Chemistry

Article reference:
Overview of gas-phase chemistry for dry etching semiconductor compounds // Modern scientific researches and innovations. 2014. № 6. P. 1 [Electronic journal]. URL: https://web.snauka.ru/en/issues/2014/06/35792

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