Sorry, this article is only available in Русский.
METHOD OF REDUCING TEMPERATURE ERROR IN MICROELECTROMECHANICAL SENSOR SYSTEM
Belozubov E.M.1, Belozubova N.E.2, Vasilev V.A.3, Kozlova Y.A.4
1JSC "NIIFI", Candidate. tehn. Science, Head of Group
2Penza State University, graduate student
3Penza State University, Dr. Sc. Science, Professor
4JSC "NIIFI", engineer
1JSC "NIIFI", Candidate. tehn. Science, Head of Group
2Penza State University, graduate student
3Penza State University, Dr. Sc. Science, Professor
4JSC "NIIFI", engineer
Abstract
We propose a method of reducing the temperature error in microelectromechanical system of thin-film capacitive sensor which is implemented by combining temperature dependent functions, reference and measuring containers. There are defined conditions of minimizing the effect of temperature on these systems.
Work performed at the Penza State University and JSC "NIIFI."
Category: 05.00.00 Technical sciences
Article reference:
Method of reducing temperature error in microelectromechanical sensor system // Modern scientific researches and innovations. 2011. № 8 [Electronic journal]. URL: https://web.snauka.ru/en/issues/2011/12/5426
View this article in Russian
© If you have found a violation of copyrights please notify us immediately by e-mail or feedback form.
Contact author (comments/reviews)
Write comment
You must authorise to write a comment.
Если Вы еще не зарегистрированы на сайте, то Вам необходимо зарегистрироваться: