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METHOD OF REDUCING TEMPERATURE ERROR IN MICROELECTROMECHANICAL SENSOR SYSTEM
Belozubov E.M.1, Belozubova N.E.2, Vasilev V.A.3, Kozlova Y.A.4
1JSC "NIIFI", Candidate. tehn. Science, Head of Group
2Penza State University, graduate student
3Penza State University, Dr. Sc. Science, Professor
4JSC "NIIFI", engineer
1JSC "NIIFI", Candidate. tehn. Science, Head of Group
2Penza State University, graduate student
3Penza State University, Dr. Sc. Science, Professor
4JSC "NIIFI", engineer
Abstract
We propose a method of reducing the temperature error in microelectromechanical system of thin-film capacitive sensor which is implemented by combining temperature dependent functions, reference and measuring containers. There are defined conditions of minimizing the effect of temperature on these systems.
Work performed at the Penza State University and JSC "NIIFI."
Category: 05.00.00 Technical sciences
Article reference:
Method of reducing temperature error in microelectromechanical sensor system // Modern scientific researches and innovations. 2011. № 8 [Electronic journal]. URL: https://web.snauka.ru/en/issues/2011/12/5426
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