ISSN 2223-4888
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Electronic scientific & practical journal «Modern scientific researches and innovations»
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Author:
Александр Запевалин
Author's name:
Запевалин Александр
Author's website:
http://vk.com/id7667329
Articles of the author in journal «Modern scientific researches and innovations»
Обзор газовой химии используемой для плазмохимического травления Si, SiO2 и Si3N4
№ 6 June 2014 | Category:
01.00.00 Physics and mathematics
Обзор газовой химии для сухого травления полупроводниковых соединений
№ 6 June 2014 | Category:
02.00.00 Chemistry
Articles of the author in journal «Modern Technics and Technologies»
Zapevalin A.I. Lag effects in the plasma etching of silicon
June, 2014
Zapevalin A.I. An overview of high-Aspect process silicon etching
June, 2014